SiC awo jẹ iru 0 porosity ipon awọn ohun elo amọ, eyiti o da lori SiC ati sintered ni 2250 ℃.Akoonu SiC jẹ diẹ sii ju 99.6%, agbara atunse jẹ diẹ sii ju 410mpa ati ina elekitiriki jẹ 140W / MK o jẹ ohun elo seramiki nikan ni sooro si HF, H2SO4 ati ipata acid miiran ti o lagbara.
Awọn anfani ti awọn ohun elo seramiki silikoni carbide:
1, olùsọdipúpọ ti imugboroja gbona jẹ kekere, sunmọ si ohun alumọni;
2, o tayọ yiya resistance, líle keji nikan lati Diamond;
3, o tayọ gbona iba ina elekitiriki, ga otutu resistance ati ki o yara ooru wọbia;
![Silikoni carbide chuck3](http://www.semi-cera.com/uploads/Silicon-carbide-chuck3.png)
Imọ paramita
![图片1](http://www.semi-cera.com/uploads/15a6ba392.png)