Blue / alawọ ewe LED epitaxy lati semicera nfunni awọn solusan gige-eti fun iṣelọpọ LED iṣẹ-giga. Ti a ṣe apẹrẹ lati ṣe atilẹyin awọn ilana idagbasoke epitaxial ti ilọsiwaju, imọ-ẹrọ epitaxy Blue/green LED semicera ṣe imudara ṣiṣe ati pipe ni ṣiṣe awọn LED buluu ati alawọ ewe, pataki fun ọpọlọpọ awọn ohun elo optoelectronic. Lilo ipo-ti-ti-aworan Si Epitaxy ati SiC Epitaxy, ojutu yii ṣe idaniloju didara didara ati agbara to dara julọ.
Ninu ilana iṣelọpọ, MOCVD Susceptor ṣe ipa pataki, pẹlu awọn paati bii PSS Etching Carrier, ICP Etching Carrier, ati RTP Carrier, eyiti o mu agbegbe idagbasoke epitaxial pọ si. Semicera's Blue/green LED epitaxy jẹ apẹrẹ lati pese atilẹyin iduroṣinṣin fun LED Epitaxial Susceptor, Barrel Susceptor, ati Monocrystalline Silicon, ni idaniloju iṣelọpọ deede, awọn abajade didara to gaju.
Ilana epitaxy yii jẹ pataki fun ṣiṣẹda Awọn ẹya fọtovoltaic ati atilẹyin awọn ohun elo bii GaN lori SiC Epitaxy, imudarasi ṣiṣe ṣiṣe semikondokito gbogbogbo. Boya ni iṣeto ni Susceptor Pancake tabi ti a lo ninu awọn iṣeto ilọsiwaju miiran, awọn solusan epitaxy Blue/green LED semicera nfunni ni iṣẹ igbẹkẹle, ṣe iranlọwọ fun awọn aṣelọpọ lati pade ibeere ti ndagba fun awọn paati LED didara giga.
Awọn ẹya akọkọ:
1. Idaabobo ifoyina otutu otutu:
resistance ifoyina tun dara pupọ nigbati iwọn otutu ba ga to 1600 C.
2. Iwa mimọ ti o ga julọ: ti a ṣe nipasẹ ifasilẹ oru kemikali labẹ ipo chlorination otutu otutu.
3. Ogbara resistance: ga líle, iwapọ dada, itanran patikulu.
4. Ipata resistance: acid, alkali, iyo ati Organic reagents.
Main pato tiCVD-SIC Aso
| Awọn ohun-ini SiC-CVD | ||
| Crystal Be | FCC β ipele | |
| iwuwo | g/cm³ | 3.21 |
| Lile | Vickers líle | 2500 |
| Iwọn Ọkà | μm | 2 ~ 10 |
| Kẹmika Mimọ | % | 99.99995 |
| Agbara Ooru | J·k-1 · K-1 | 640 |
| Sublimation otutu | ℃ | 2700 |
| Agbara Felexural | MPa (RT 4-ojuami) | 415 |
| Modulu ọdọ | Gpa (4pt tẹ, 1300℃) | 430 |
| Imugboroosi Gbona (CTE) | 10-6K-1 | 4.5 |
| Gbona elekitiriki | (W/mK) | 300 |
