Ifihan si Silicon Carbide Coating
Isọdi Omi Kemikali wa (CVD) Silicon Carbide (SiC) ti a bo jẹ ti o tọ ga julọ ati Layer sooro, o dara fun awọn agbegbe ti n beere ipata giga ati resistance igbona.Silikoni Carbide ti a boti wa ni loo ni tinrin fẹlẹfẹlẹ lori orisirisi sobsitireti nipasẹ awọn CVD ilana, laimu superior išẹ abuda.
Key Awọn ẹya ara ẹrọ
● -Iwa Mimọ Iyatọ: Iṣogo ohun olekenka-funfun tiwqn ti99.99995%, tiwaSiC ti a bodinku awọn ewu idoti ni awọn iṣẹ semikondokito ifura.
● -Superior Resistance: Ṣe afihan resistance ti o dara julọ si awọn mejeeji yiya ati ibajẹ, ti o jẹ ki o jẹ pipe fun awọn iṣoro kemikali ati awọn eto pilasima.
● -High Gbona Conductivity: Ṣe idaniloju iṣẹ ṣiṣe ti o gbẹkẹle labẹ awọn iwọn otutu to gaju nitori awọn ohun-ini igbona ti o lapẹẹrẹ.
● -Iduroṣinṣin Onisẹpo: Ṣe itọju iduroṣinṣin igbekalẹ kọja ọpọlọpọ awọn iwọn otutu, o ṣeun si ilodisi imugboroja igbona kekere rẹ.
● -Imudara Lile: Pẹlu a líle Rating ti40 GPA, Aṣọ SiC wa duro ni ipa pataki ati abrasion.
● -Dan dada Pari: Pese ipari-bi digi, idinku iran patiku ati imudara iṣẹ ṣiṣe.
Awọn ohun elo
Semicera Awọn ideri SiCTi lo ni awọn ipele pupọ ti iṣelọpọ semikondokito, pẹlu:
●LED Chip iṣelọpọ
●iṣelọpọ Polysilicon
●Semikondokito Crystal Growth
●Ohun alumọni ati SiC Epitaxy
●Oxidiation Gbona ati Itankale (TO&D)
A pese awọn ohun elo ti a bo SiC ti a ṣe lati inu graphite isostatic ti o ni agbara giga, carbon fiber-fifidi erogba ati 4N carbide silicon recrystallized, ti a ṣe deede fun awọn olutọpa ibusun-omi,Awọn oluyipada STC-TCS, awọn olufihan apa CZ, ọkọ oju omi wafer SiC, paddle SiCwafer, tube SiC wafer, ati awọn gbigbe wafer ti a lo ninu PECVD, epitaxy silikoni, awọn ilana MOCVD.
Awọn anfani
● -Ipari Igbesi aye: Ṣe pataki dinku idinku ohun elo ati awọn idiyele itọju, imudara iṣelọpọ iṣelọpọ gbogbogbo.
● -Imudara Didara: Ṣe aṣeyọri awọn ipele mimọ-giga pataki fun sisẹ semikondokito, nitorinaa igbelaruge didara ọja.
● -Imudara Imudara: Ṣe iṣapeye awọn ilana igbona ati awọn ilana CVD, Abajade ni awọn akoko gigun kukuru ati awọn eso ti o ga julọ.
Imọ ni pato
● -Eto: FCC β polycrystaline alakoso, nipataki (111) ti o wa ni iṣalaye
● -iwuwo: 3.21 g/cm³
● - Lile: 2500 Vickes lile (ẹrù 500g)
● -Egugun Toughness: 3.0 MPa ·1/2
● -Imugboroosi Gbona (100-600 °C): 4.3 x 10-6k-1
● -Elastic Modulu(1300 ℃):435 GPA
● -Aṣoju Film Sisanra:100 µm
● -Irora Dada:2-10 µm
Data Mimo (Tiwọn nipasẹ Glow Discharge Mass Spectroscopy)
| Eroja | ppm | Eroja | ppm |
| Li | <0.001 | Cu | <0.01 |
| Be | <0.001 | Zn | <0.05 |
| Al | <0.04 | Ga | <0.01 |
| P | <0.01 | Ge | <0.05 |
| S | <0.04 | As | <0.005 |
| K | <0.05 | In | <0.01 |
| Ca | <0.05 | Sn | <0.01 |
| Ti | <0.005 | Sb | <0.01 |
| V | <0.001 | W | <0.05 |
| Cr | <0.05 | Te | <0.01 |
| Mn | <0.005 | Pb | <0.01 |
| Fe | <0.05 | Bi | <0.05 |
| Ni | <0.01 |
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