Awọn atẹ pin SiC fun awọn ilana etching ICP ni ile-iṣẹ LED

Apejuwe kukuru:

Silikoni carbide jẹ iru tuntun ti awọn ohun elo amọ pẹlu iṣẹ idiyele giga ati awọn ohun-ini ohun elo to dara julọ. Nitori awọn ẹya ara ẹrọ bii agbara giga ati lile, resistance otutu otutu, iba ina elekitiriki nla ati resistance ipata kemikali, Silicon Carbide le fẹrẹ duro gbogbo alabọde kemikali. Nitorinaa, SiC ni lilo pupọ ni iwakusa epo, kemikali, ẹrọ ati aaye afẹfẹ, paapaa agbara iparun ati ologun ni awọn ibeere pataki wọn lori SIC.

A ni anfani lati ṣe apẹrẹ ati iṣelọpọ ni ibamu si awọn iwọn pato rẹ pẹlu didara to dara ati akoko ifijiṣẹ oye.


Alaye ọja

ọja Tags

ọja Apejuwe

Ile-iṣẹ wa pese awọn iṣẹ ilana ibora SiC nipasẹ ọna CVD lori oju ti graphite, awọn ohun elo amọ ati awọn ohun elo miiran, nitorinaa awọn gaasi pataki ti o ni erogba ati ohun alumọni fesi ni iwọn otutu giga lati gba awọn ohun elo SiC mimọ giga, awọn ohun elo ti a fi silẹ lori oju awọn ohun elo ti a bo, lara SIC aabo Layer.

Awọn ẹya akọkọ:

1. Idaabobo ifoyina otutu otutu:

resistance ifoyina tun dara pupọ nigbati iwọn otutu ba ga to 1600 C.

2. Iwa mimọ ti o ga julọ: ti a ṣe nipasẹ ifasilẹ oru kemikali labẹ ipo chlorination otutu otutu.

3. Ogbara resistance: ga líle, iwapọ dada, itanran patikulu.

4. Ipata resistance: acid, alkali, iyo ati Organic reagents.

Silikoni carbide etched disk (2)

Awọn pato akọkọ ti CVD-SIC Coating

Awọn ohun-ini SiC-CVD

Crystal Be

FCC β ipele

iwuwo

g/cm³

3.21

Lile

Vickers líle

2500

Iwọn Ọkà

μm

2 ~ 10

Kẹmika Mimọ

%

99.99995

Agbara Ooru

J·k-1 · K-1

640

Sublimation otutu

2700

Agbara Felexural

MPa (RT 4-ojuami)

415

Modulu ọdọ

Gpa (4pt tẹ, 1300℃)

430

Imugboroosi Gbona (CTE)

10-6K-1

4.5

Gbona elekitiriki

(W/mK)

300

Semicera Work ibi
Ibi iṣẹ Semicera 2
Ẹrọ ẹrọ
CNN processing, kemikali ninu, CVD bo
Iṣẹ wa

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