Awọn gbigbe ti a bo SiC fun etching semikondokito

Apejuwe kukuru:

Semicera Semiconductor Technology Co., Ltd jẹ olutaja oludari ti awọn ohun elo amọ semikondokito to ti ni ilọsiwaju. Awọn ọja akọkọ wa pẹlu: Silicon carbide etched discs, awọn olutọpa ọkọ oju omi silikoni, awọn ọkọ oju omi wafer silikoni (PV & Semiconductor), awọn tubes ileru ohun alumọni, awọn paddles carbide cantilever, ohun alumọni carbide chuck, awọn beams siliki carbide, ati awọn aṣọ ibora CVD SiC ati Awọn ideri TaC.

Awọn ọja naa ni a lo ni akọkọ ni semikondokito ati awọn ile-iṣẹ fọtovoltaic, gẹgẹbi idagbasoke gara, epitaxy, etching, apoti, ibora ati ohun elo ileru tan kaakiri.

 

 


Alaye ọja

ọja Tags

Apejuwe

Ile-iṣẹ wa pese awọn iṣẹ ilana ibora SiC nipasẹ ọna CVD lori oju ti graphite, awọn ohun elo amọ ati awọn ohun elo miiran, nitorinaa awọn gaasi pataki ti o ni erogba ati ohun alumọni fesi ni iwọn otutu giga lati gba awọn ohun elo SiC mimọ giga, awọn ohun elo ti a fi silẹ lori oju awọn ohun elo ti a bo, lara SIC aabo Layer.

Akọkọ Awọn ẹya ara ẹrọ

1. Idaabobo ifoyina otutu otutu:
resistance ifoyina tun dara pupọ nigbati iwọn otutu ba ga to 1600 C.
2. Iwa mimọ ti o ga julọ: ti a ṣe nipasẹ ifasilẹ oru kemikali labẹ ipo chlorination otutu otutu.
3. Ogbara resistance: ga líle, iwapọ dada, itanran patikulu.
4. Ipata resistance: acid, alkali, iyo ati Organic reagents.

Awọn pato akọkọ ti CVD-SIC Coating

Awọn ohun-ini SiC-CVD

Crystal Be FCC β ipele
iwuwo g/cm³ 3.21
Lile Vickers líle 2500
Iwọn Ọkà μm 2 ~ 10
Kẹmika Mimọ % 99.99995
Agbara Ooru J·k-1 · K-1 640
Sublimation otutu 2700
Agbara Felexural MPa (RT 4-ojuami) 415
Modulu ọdọ Gpa (4pt tẹ, 1300℃) 430
Imugboroosi Gbona (CTE) 10-6K-1 4.5
Gbona elekitiriki (W/mK) 300
Semicera Work ibi
Ibi iṣẹ Semicera 2
Ẹrọ ẹrọ
CNN processing, kemikali ninu, CVD bo
Iṣẹ wa

  • Ti tẹlẹ:
  • Itele: