SiC Ti a bo Graphite Base Susceptors fun MOCVD

SiC Ti a bo Graphite Mimọ Susceptorsfun MOCVD lati semicera jẹ iṣẹ-ṣiṣe lati pese iṣẹ ṣiṣe alailẹgbẹ ni awọn ilana idagbasoke epitaxial. Ohun elo ohun alumọni carbide ti o ni agbara ti o ga julọ lori ipilẹ graphite ṣe idaniloju iduroṣinṣin, agbara, ati imudara igbona ti o dara julọ lakoko awọn iṣẹ MOCVD (Metal Organic Chemical Vapor Deposition). Nipa lilo imọ-ẹrọ alailagbara imotuntun ti semicera, o le ṣaṣeyọri imudara imudara ati ṣiṣe niNipa EpitaxyatiSiC apọjuawọn ohun elo.

Awọn wọnyiMOCVD Susceptorsjẹ apẹrẹ lati ṣe atilẹyin fun ọpọlọpọ awọn paati semikondokito pataki, gẹgẹbiPSS Etching ti ngbe, ICP Etching ti ngbe, atiRTP ti ngbe, ṣiṣe wọn wapọ fun orisirisi etching ati epitaxial awọn iṣẹ-ṣiṣe. Ifaramo Semicera si awọn iṣedede giga ṣe idaniloju pe awọn alailagbara wọnyi pade awọn ibeere lile ti iṣelọpọ semikondokito ode oni.

Apẹrẹ fun lilo ninuLED EpitaxialSusceptor, Barrel Susceptor, ati Monocrystalline Silicon lakọkọ, awọn ifura wọnyi le jẹ adani fun awọn titobi wafer oriṣiriṣi, pẹlu awọn atunto Pancake Susceptor. Wọn tun munadoko gaan ni mimu Awọn ẹya Photovoltaic mu, ṣiṣe wọn jẹ paati pataki ni idagbasoke awọn sẹẹli oorun daradara.

Ni afikun, SiC Coated Graphite Base Susceptors fun MOCVD jẹ iṣapeye fun GaN lori SiC Epitaxy, nfunni ni ibamu giga pẹlu awọn ohun elo semikondokito to ti ni ilọsiwaju. Boya o ni idojukọ lori imudarasi awọn ikore tabi imudara didara idagbasoke epitaxial, awọn alailagbara semicera pese igbẹkẹle ati iṣẹ ṣiṣe ti o nilo fun aṣeyọri ni awọn ile-iṣẹ imọ-ẹrọ giga.