SiC Coating Graphite Wafer Susceptor

Apejuwe kukuru:

Semicera Semiconductor's SiC Coating Graphite Wafer Susceptor n pese iṣẹ ṣiṣe igbona ti o ga julọ ati agbara fun sisẹ wafer. Gbẹkẹle Semicera fun awọn alamọdaju SiC ti o ni ilọsiwaju ti a ṣe apẹrẹ lati jẹki ṣiṣe ati igbẹkẹle ninu awọn ohun elo semikondokito.

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Alaye ọja

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Apejuwe

Semicorex's SiC Wafer Susceptors fun MOCVD (Metal-Organic Kemikali Vapor Deposition) jẹ iṣẹ-ṣiṣe lati pade awọn ibeere deede ti awọn ilana ifisilẹ epitaxial. Lilo Silicon Carbide (SiC) ti o ni agbara giga, awọn alailagbara wọnyi nfunni ni agbara ailopin ati iṣẹ ni iwọn otutu giga ati awọn agbegbe ibajẹ, ni idaniloju idagbasoke deede ati daradara ti awọn ohun elo semikondokito.

Awọn ẹya pataki:

1. Superior elo PropertiesTi a ṣe lati SiC-giga, awọn alailagbara wafer ṣe afihan adaṣe igbona alailẹgbẹ ati resistance kemikali. Awọn ohun-ini wọnyi jẹ ki wọn koju awọn ipo to gaju ti awọn ilana MOCVD, pẹlu awọn iwọn otutu giga ati awọn gaasi ipata, ni idaniloju igbesi aye gigun ati iṣẹ igbẹkẹle.

2. Itọkasi ni Ikọlẹ EpitaxialImọ-ẹrọ deede ti SiC Wafer Susceptors wa ṣe idaniloju pinpin iwọn otutu aṣọ ile kọja dada wafer, irọrun ni ibamu ati idagbasoke ipele epitaxial didara ga. Itọkasi yii ṣe pataki fun iṣelọpọ semikondokito pẹlu awọn ohun-ini itanna to dara julọ.

3. Imudara ImudaraOhun elo SiC ti o lagbara n pese resistance to dara julọ lati wọ ati ibajẹ, paapaa labẹ ifihan lemọlemọfún si awọn agbegbe ilana lile. Itọju yii dinku igbohunsafẹfẹ ti awọn rirọpo susceptor, idinku akoko idinku ati awọn idiyele iṣẹ.