PSS Processing ti ngbe fun Semikondokito Wafer Gbigbe

Apejuwe kukuru:

Oluṣeto Processing PSS ti Semicera fun Gbigbe Semiconductor Wafer jẹ iṣelọpọ fun mimu daradara ati gbigbe awọn wafers semikondokito lakoko awọn ilana iṣelọpọ. Ti a ṣe lati awọn ohun elo ti o ni agbara giga, agbẹru yii ṣe idaniloju titete deede, idoti ti o kere ju, ati gbigbe wafer didan. Ti a ṣe apẹrẹ fun ile-iṣẹ semikondokito, awọn agbẹru PSS ti Semicera ṣe imudara ilana ṣiṣe, igbẹkẹle, ati ikore, ṣiṣe wọn jẹ paati pataki ni sisẹ wafer ati awọn ohun elo mimu.


Alaye ọja

ọja Tags

ọja Apejuwe

Ile-iṣẹ wa pese awọn iṣẹ ilana ibora SiC nipasẹ ọna CVD lori oju ti graphite, awọn ohun elo amọ ati awọn ohun elo miiran, nitorinaa awọn gaasi pataki ti o ni erogba ati ohun alumọni fesi ni iwọn otutu giga lati gba awọn ohun elo SiC mimọ giga, awọn ohun elo ti a fi silẹ lori oju awọn ohun elo ti a bo, lara SIC aabo Layer.

Awọn ẹya akọkọ:

1. Idaabobo ifoyina otutu otutu:

resistance ifoyina tun dara pupọ nigbati iwọn otutu ba ga to 1600 C.

2. Iwa mimọ to gaju: ti a ṣe nipasẹ ifasilẹ ọru kemikali labẹ ipo chlorination otutu otutu.

3. Ogbara resistance: ga líle, iwapọ dada, itanran patikulu.

4. Ipata resistance: acid, alkali, iyo ati Organic reagents.

Awọn pato akọkọ ti CVD-SIC Coating

Awọn ohun-ini SiC-CVD

Crystal Be

FCC β ipele

iwuwo

g/cm³

3.21

Lile

Vickers líle

2500

Iwọn Ọkà

μm

2 ~ 10

Kẹmika ti nw

%

99.99995

Agbara Ooru

J·k-1 · K-1

640

Sublimation otutu

2700

Agbara Felexural

MPa (RT 4-ojuami)

415

Modulu ọdọ

Gpa (4pt tẹ, 1300℃)

430

Imugboroosi Gbona (CTE)

10-6K-1

4.5

Gbona elekitiriki

(W/mK)

300

Semicera Work ibi
Ibi iṣẹ Semicera 2
Ẹrọ ẹrọ
CNN processing, kemikali ninu, CVD bo
Iṣẹ wa

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