Awọn ohun elo semikondokito iran kẹta ni akọkọ pẹlu SiC, GaN, diamond, ati bẹbẹ lọ, nitori iwọn aafo ẹgbẹ rẹ (Fun apẹẹrẹ) tobi ju tabi dogba si 2.3 volts elekitironi (eV), ti a tun mọ ni awọn ohun elo aafo jakejado band.Ti a ṣe afiwe pẹlu awọn ohun elo semikondokito iran akọkọ ati keji, awọn ohun elo semikondokito iran kẹta ni awọn anfani ti ina elekitiriki giga, aaye ina gbigbẹ giga, oṣuwọn ijira elekitironi ti o ga ati agbara isunmọ giga, eyiti o le pade awọn ibeere tuntun ti imọ-ẹrọ itanna igbalode fun giga. iwọn otutu, agbara giga, titẹ giga, igbohunsafẹfẹ giga ati resistance itankalẹ ati awọn ipo lile miiran.O ni awọn ifojusọna ohun elo pataki ni awọn aaye ti aabo orilẹ-ede, ọkọ oju-ofurufu, afẹfẹ, iṣawari epo, ibi ipamọ opiti, ati bẹbẹ lọ, ati pe o le dinku pipadanu agbara nipasẹ diẹ sii ju 50% ni ọpọlọpọ awọn ile-iṣẹ ilana gẹgẹbi awọn ibaraẹnisọrọ gbooro, agbara oorun, iṣelọpọ ọkọ ayọkẹlẹ, ina semikondokito, ati akoj smart, ati pe o le dinku iwọn ohun elo nipasẹ diẹ sii ju 75%, eyiti o jẹ pataki pataki fun idagbasoke imọ-ẹrọ ati imọ-ẹrọ eniyan.
| Nkan 项目 | GaN-FS-CU-C50 | GaN-FS-CN-C50 | GaN-FS-C-SI-C50 |
| Iwọn opin | 50,8 ± 1 mm | ||
| Sisanra厚度 | 350 ± 25 μm | ||
| Iṣalaye | C ofurufu (0001) kuro ni igun si M-axis 0.35 ± 0.15° | ||
| NOMBA Flat | (1-100) 0 ± 0.5°, 16 ± 1 mm | ||
| Atẹle Flat | (11-20) 0 ± 3 °, 8 ± 1 mm | ||
| Iwa ihuwasi | N-iru | N-iru | Ologbele-Idabobo |
| Atako (300K) | <0.1 Ω·cm | <0.05 Ω·cm | > 106 Ω·cm |
| TTV | ≤ 15 μm | ||
| teriba | ≤20 μm | ||
| Ga Face dada Roughness | <0.2 nm (didan); | ||
| tabi <0.3 nm (didan ati itọju dada fun epitaxy) | |||
| N Face Dada Roughness | 0.5 ~ 1.5 μm | ||
| aṣayan: 1 ~ 3 nm (ilẹ ti o dara);<0.2 nm (didan) | |||
| Dislocation iwuwo | Lati 1 x 105 si 3 x 106 cm-2 (ṣe iṣiro nipasẹ CL)* | ||
| Makiro Àìpé iwuwo | <2 cm-2 | ||
| Agbegbe to wulo | > 90% (iyasoto eti ati awọn abawọn Makiro) | ||
| Le ṣe adani ni ibamu si awọn ibeere alabara, eto oriṣiriṣi ti ohun alumọni, oniyebiye, SiC orisun GaN epitaxial dì. | |||
