Silicon carbide (SiC) ohun elo kirisita ẹyọkan ni iwọn aafo ẹgbẹ nla kan (~ Si awọn akoko 3), iba ina gbigbona giga (~ Si awọn akoko 3.3 tabi awọn akoko GaAs awọn akoko 10), oṣuwọn ijira itẹlọrun elekitironi giga (~ Awọn akoko 2.5), ina didenukole giga aaye (~ Si 10 igba tabi GaAs 5 igba) ati awọn miiran dayato si abuda.
Awọn ẹrọ SiC ni awọn anfani ti ko ni iyipada ni aaye ti iwọn otutu giga, titẹ giga, igbohunsafẹfẹ giga, awọn ẹrọ itanna agbara giga ati awọn ohun elo ayika ti o pọju gẹgẹbi afẹfẹ, ologun, agbara iparun, ati bẹbẹ lọ, ṣe fun awọn abawọn ti awọn ohun elo semikondokito ibile ni ilowo. awọn ohun elo, ati pe o di ọna akọkọ ti awọn semikondokito agbara.
4H-SiC Silicon carbide sobusitireti pato
Nkan 项目 | Awọn pato | |
Polytype | 4H -SiC | 6H- SiC |
Iwọn opin | 2 inch | 3 inch | 4 inch | 6inch | 2 inch | 3 inch | 4 inch | 6inch |
Sisanra | 330 μm ~ 350 μm | 330 μm ~ 350 μm |
Iwa ihuwasi | N – iru / Ologbele-idabobo | N – iru / Ologbele-idabobo |
Dopant | N2 (Nitrogen) V (Vanadium) | N2 (Nitrogen) V (Vanadium) |
Iṣalaye | Lori ipo <0001> | Lori ipo <0001> |
Resistivity | 0.015 ~ 0.03 ohm-cm | 0.02 ~ 0.1 ohm-cm |
Ìwọ̀n Múkìkí (MPD) | ≤10/cm2 ~ ≤1/cm2 | ≤10/cm2 ~ ≤1/cm2 |
TTV | ≤ 15 μm | ≤ 15 μm |
Teriba / Warp | ≤25 μm | ≤25 μm |
Dada | DSP/SSP | DSP/SSP |
Ipele | Gbóògì / Iwadi ite | Gbóògì / Iwadi ite |
Crystal Stacking ọkọọkan | ABCB | ABCABC |
paramita latissi | a = 3.076A, c = 10.053A | a=3.073A, c=15.117A |
Fun apẹẹrẹ/eV(Aafo-ọpa) | 3,27 eV | 3.02 eV |
ε(Dielectric Constant) | 9.6 | 9.66 |
Refraction Atọka | n0 = 2,719 ne = 2,777 | n0 = 2.707, ko = 2.755 |
6H-SiC Silicon Carbide sobusitireti pato
Nkan 项目 | Awọn pato |
Polytype | 6H-SiC |
Iwọn opin | 4 inch | 6inch |
Sisanra | 350μm ~ 450μm |
Iwa ihuwasi | N – iru / Ologbele-idabobo |
Dopant | N2(Nitrogen) |
Iṣalaye | <0001> pa 4°± 0.5° |
Resistivity | 0.02 ~ 0.1 ohm-cm |
Ìwọ̀n Múkìkí (MPD) | ≤ 10/cm2 |
TTV | ≤ 15 μm |
Teriba / Warp | ≤25 μm |
Dada | Si Oju: CMP, Epi-Ṣetan |
Ipele | Iwadi ite |